bonded door seals | dupont™ kalrez®-j9九游会老哥论坛

bonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional o-rings by reducing particle generation, extending seal life and minimizing replacement time during preventive maintenance.

dupont^™ kalrez^® bonded door seals are designed for easy installation and low particle generation. they combine a custom seal design and proprietary adhesion technology along with the excellent plasma resistance of kalrez^® perfluoroelastomer seal materials developed for semiconductor applications. the seal is held in a “fixed” position versus conventional o-rings, thereby eliminating “rolling/twisting” and abrasion during door actuation. in addition, the seal design has been optimized using finite element analysis (fea) to minimize high concentrations of localized stresses. as a result, both particle generation and sealing performance are significantly improved versus conventional o-rings.

typical applications

bonded door seals replace o-ring seals currently used in gate valve, and slit valve dovetail grooves in particle sensitive semiconductor etch, ash, strip and/or deposition processes.

lower particle generation and extended seal life versus conventional o-rings

• sealing element held in a “fixed” position, i.e., eliminates “rolling/twisting” in service
• design eliminates o-ring abrasion against edge of dovetail groove during actuation/compression
• kalrez^® semicon product grades used to minimize particle generation in reactive plasmas
• kalrez^® ultrapure^™ post-cleaning and packaging reduces unwanted contamination
• improved sealing performance—optimal design minimizes high concentrations of localized stresses
  

less replacement time versus o-ring seals during preventive maintenance

• quick and easy assembly/disassembly to mounting hardware
• reduces installation problems commonly experienced with o-ring seals
• eliminates need to clean the seal gland during preventive maintenance
• barcode on packaging plus bonded door seal part number and kalrez^® product number engraved on back of commercially available bonded door seals enables traceability and identification providing assurance that it is a kalrez^® perfluoroelastomer part (ffkm).
  

availability

dupont^™ kalrez^® bonded door seals are available for a number of valve types used in semiconductor oem equipment platforms.  in addition, a custom kalrez^® bonded door seal can be developed for most gate valve and slit valve door applications if not currently available.  kalrez^® ultrapure^™ post cleaning and packaging is standard for all bonded door seals.